{"title":"How To Determine Fluorine Contamination Level On A Normal Al Bondpad?","authors":"H. Younan","doi":"10.1109/IPFA47161.2019.8984826","DOIUrl":null,"url":null,"abstract":"IN our previous paper, we discussed the differences between EDS and AES and concluded that EDS couldn’t be used to determine F level on A Normal Al bondpad. In this paper, we will discuss how we can determine fluorine contamination level on a normal Al bondpad and propose to use AES/XPS to analyse fluorine level on a normal Al bondpad in wafer fabrication.","PeriodicalId":169775,"journal":{"name":"2019 IEEE 26th International Symposium on Physical and Failure Analysis of Integrated Circuits (IPFA)","volume":"28 47","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 IEEE 26th International Symposium on Physical and Failure Analysis of Integrated Circuits (IPFA)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IPFA47161.2019.8984826","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
IN our previous paper, we discussed the differences between EDS and AES and concluded that EDS couldn’t be used to determine F level on A Normal Al bondpad. In this paper, we will discuss how we can determine fluorine contamination level on a normal Al bondpad and propose to use AES/XPS to analyse fluorine level on a normal Al bondpad in wafer fabrication.
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