Using the charge pumping geometric component to extract NBTI induced mobility degradation

M. Boubaaya, H. Tahi, Cherifa Tahanout, B. Djezzar, Abdelmadjid Benabdelmomene, A. Chenouf, D. Doumaz, Abdelhak Feraht Hemida
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Abstract

Instead, the classical consideration that the geometric component in charge pumping method (CP) is parasitic component, in this work we demonstrate that this component can be used to estimate the negative bias temperature (NBTI) induced mobility degradation using the charge pumping based method such as on- the-fly interface trap (OTFIT).
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利用电荷抽运几何分量提取NBTI诱导的迁移率退化
相反,传统的考虑电荷泵送方法(CP)中的几何分量是寄生分量,在这项工作中,我们证明了该分量可以用来估计负偏置温度(NBTI)引起的迁移率下降,使用基于电荷泵送的方法,如在线界面陷阱(OTFIT)。
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