3D self-assembling and actuation of electrostatic micro-mirrors

Abstract

3D Polysilicon micro-parts are self-assembled by beam buckling induced by integrated Scratch Drive Actuator (SDA). With this technique, 380*250 μm2 micro-mirror were lifted 90 μm above the substrate plane. The 3D shapes were permanently kept by 2 different ways: i) mechanical locking produced by integrated clips and ii) electric field induced stiction. Subsequent to the assembling, micro-mirrors are successfully actuated by biasing underneath buried electrodes. Controlled motion up to +/15 ̊ rotation was successfully obtained even for long term experiments. This paper reports for the first time on the actuation of permanent 3D self-assembled micro-mirror for beam steering application.