{"title":"The influence of silicon interstitial clusters on the Reverse Short Channel Effect","authors":"C. Tsamis, D. Tsoukalas, A. Tserepi, E. Tsoi","doi":"10.1109/ESSDERC.2000.194742","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":354721,"journal":{"name":"30th European Solid-State Device Research Conference","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2001-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"30th European Solid-State Device Research Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ESSDERC.2000.194742","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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