{"title":"A next queue algorithm in real time dispatching system of semiconductor manufacturing","authors":"Ying-Jen Chen, G. Yu., Kuo-sung Huang, Ivan Wang","doi":"10.1109/ISSM.2000.993618","DOIUrl":null,"url":null,"abstract":"We demonstrate a next-queue rule in the real time dispatcher developed in MXIC FAB I. The outline of this system is presented first, then, the dispatching rule design logic is described. The real time dispatching system makes lot-dispatching work easy for operators. A next queue algorithm was developed in the implementation of the real time dispatcher. Finally, it has been proved that the dispatching algorithm not only improves FAB utilization but also reduces cycle time. Implementation of the real time dispatching system keeps reducing of cycle time and improves tool utilization by 7% from Q2 1999 to now.","PeriodicalId":104122,"journal":{"name":"Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130)","volume":"353 2","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-09-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISSM.2000.993618","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 6
Abstract
We demonstrate a next-queue rule in the real time dispatcher developed in MXIC FAB I. The outline of this system is presented first, then, the dispatching rule design logic is described. The real time dispatching system makes lot-dispatching work easy for operators. A next queue algorithm was developed in the implementation of the real time dispatcher. Finally, it has been proved that the dispatching algorithm not only improves FAB utilization but also reduces cycle time. Implementation of the real time dispatching system keeps reducing of cycle time and improves tool utilization by 7% from Q2 1999 to now.
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