Environmental management activities by NEC electron devices

T. Nozaki
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Abstract

This paper describes the environmental activities being carried out by the Electron Devices group of NEC. Environmental problems have become a global concern rather than a regional concern, and have also become a management concern in the present day society. We report here an example of industry-leading efforts of pursuing waste material reduction, green product promotion activity, as well as environmental accounting, and discuss the importance of environmental management for the 21st century which is being called the "Environment Century".
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NEC电子设备的环境管理活动
本文描述了NEC电子器件组正在开展的环境活动。环境问题已经成为一个全球性的问题,而不是区域性的问题,在当今社会也成为一个管理问题。我们在此报告一个行业领先的努力,追求减少废物,绿色产品推广活动,以及环境会计的例子,并讨论环境管理在21世纪被称为“环境世纪”的重要性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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Process module control for low-/spl kappa/ dielectrics [CVD] A next queue algorithm in real time dispatching system of semiconductor manufacturing New identification system for individual wafer management International reuse program in a green field Fab Environmental management activities by NEC electron devices
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