{"title":"Realisation of silicon based dielectrics anti-resonant reflecting optical waveguide (ARROW) on InP by photochemical deposition","authors":"A. Sayah, Y. Nissim, E. Toussaere","doi":"10.1109/ICIPRM.1996.492042","DOIUrl":null,"url":null,"abstract":"A basic dielectric waveguide structure (anti-resonant reflexion optical waveguide) has been studied and fabricated directly on InP. The use of photo-assisted deposition techniques has allowed us to taylor the structural properties of each deposited film. The resulting ARROW structure has many applications including optical directional couplers.","PeriodicalId":268278,"journal":{"name":"Proceedings of 8th International Conference on Indium Phosphide and Related Materials","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1996-04-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of 8th International Conference on Indium Phosphide and Related Materials","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICIPRM.1996.492042","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
A basic dielectric waveguide structure (anti-resonant reflexion optical waveguide) has been studied and fabricated directly on InP. The use of photo-assisted deposition techniques has allowed us to taylor the structural properties of each deposited film. The resulting ARROW structure has many applications including optical directional couplers.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
