Hot carrier injection on back biasing double-gate FinFET with 10 and 25-nm fin width

W. Chang, Li-Gong Cin, W. Yeh, Po-Ying Chen
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Abstract

The effects of hot carrier injection on double-gate FinFETs with fin widths (Wfin) of 10 and 25 nm with positive and negative back biases are compared in this study. The FinFETs with a positive bias and narrow Wfin exhibit a large current tuning range but experiences high degradation after stress. By contrast, a negative back bias alleviates degradation but also eliminates the drive current.
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10和25nm翅片宽度的后偏置双栅FinFET热载流子注入
本文比较了热载流子注入对鳍宽分别为10 nm和25 nm、正背偏和负背偏双栅finfet的影响。具有正偏置和窄Wfin的finfet具有较大的电流调谐范围,但应力后劣化程度高。相反,负的反向偏置减轻了退化,但也消除了驱动电流。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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