Polymer Coatings for Better Robustness of GaN-based RF Circuits against Corrosion in SiP

G. Bellomonte, B. Atawa, A. Serghei, N. Michel, Nicolas Delpucch, M. Oualli, Q. Levesque, J. Jacquet, S. Piotrowicz, Emilie Molina, Hermann Sticglaucr, B. Lambert, C. Brylinski, S. L. Delage
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Abstract

In this paper we investigate different polymer coatings to improve robustness in Systems in Packages (SiP) devices for high performance and energy efficient RF-and mm-wave power amplifiers. Cheaper and denser integration of GaN and Si technologies is required. We studied final polymer protection coatings on the semiconductor chip that delay the corrosion phenomenon. Our first results show that BCB seems to be the most efficient protective solution, but there are other materials that could be considered, either for lower dielectric constant or for outstanding electric field handling capability.
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聚合物涂层提高氮化镓基射频电路抗SiP腐蚀的稳健性
在本文中,我们研究了不同的聚合物涂层,以提高系统封装(SiP)器件的鲁棒性,用于高性能和高能效的射频和毫米波功率放大器。需要更廉价和更密集的GaN和Si技术集成。我们研究了在半导体芯片上涂覆聚合物保护涂层以延缓腐蚀现象的发生。我们的第一个结果表明,BCB似乎是最有效的保护解决方案,但还有其他材料可以考虑,要么是较低的介电常数,要么是出色的电场处理能力。
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