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2022 14th International Conference on Advanced Semiconductor Devices and Microsystems (ASDAM)最新文献

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Importance of Mechanical Stress Study in STI based BCD Technology 机械应力研究在基于STI的BCD技术中的重要性
Ladislav Seliga, J. Pjencak, Y. Takeda, A. Hasegawa, Mitsuru Soma
The paper summarizes optimization of process integration in 0.25 µm modern Bipolar-CMOS-DMOS (BCD) technology with respect to a mechanical stress induced by Shallow Trench Isolation (STI) and Resurf OXide (ROX) during manufacturing. Process optimization by TCAD simulation and silicon experiments is discussed to reduce mechanical stress in the structures and improve yield by reducing leakage current of NMOS devices. Based on simulations results, two solutions to reduce mechanical stress are proposed and evaluated in silicon experiment. The impact of integration changes to other devices in the technology is evaluated as well.
本文总结了0.25µm现代双极- cmos - dmos (BCD)工艺集成的优化,针对制造过程中由浅沟隔离(STI)和氧化膜(ROX)引起的机械应力。通过TCAD仿真和硅实验,探讨了通过降低NMOS器件的漏电流来减小结构中的机械应力和提高良率的工艺优化。基于仿真结果,提出了两种减小机械应力的解决方案,并在硅实验中进行了评价。还评估了集成更改对该技术中其他设备的影响。
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引用次数: 0
Combination of electro / impedance / seismo / phono cardiography in medicine 在医学上结合电/阻抗/地震/声音心动图
E. Vavrinsky, M. Donoval, M. Micjan, M. Kopani, M. Stremy, T. Závodník, K. Gasparek, D. Vitazkova, H. Kosnacova
Cardiovascular diseases are the leading cause of the death worldwide. They are followed by the third most common cause and that is respiratory disease. Therefore, new methodologies such as seismocardiography (SCG), impedance cardiography (ICG) and phonocardiography (PCG) are beginning to appear [1]. Main goal of this article is to present a concept of a device for simultaneous measurement of electro, impedance, seismic and phono (EISP) cardiography and its application in the diagnosis of heart and respiration activity.
心血管疾病是世界范围内导致死亡的主要原因。排在第三位的是呼吸系统疾病。因此,新的方法如地震心动图(SCG)、阻抗心动图(ICG)和心音图(PCG)开始出现[1]。本文的主要目的是介绍一种同时测量电、阻抗、地震和声道(EISP)心电图的装置及其在心脏和呼吸活动诊断中的应用。
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引用次数: 0
Ontology web language implementation in the strategic level of ArchiMate language in the context of smart cities 智慧城市背景下本体web语言在战略层面的实现
P. Břečka, Tomáš Lajčin, Branislav Murgaš
TOGAF and its modelling language ArchiMate, are the most common standards used for this area of planning, designing, implementation as well as architectural planning. The modelling tool ArchiMate is very popular and advanced, yet it still does not reflect all demands. In this regard, it is essential to point out that there are numerous studies, focusing on its improvement and also the improvement of models for business architecture. Authors tried to enable villages and cities and other potential customers to transparently assign their goals, motivations, requests etc. into a prepared environment/model. The core idea was to use modelling language ArchiMate 3.1., which was complimented with selected features of IT ontology.
TOGAF及其建模语言ArchiMate是规划、设计、实现以及架构规划领域最常用的标准。建模工具ArchiMate是非常流行和先进的,但它仍然不能反映所有的需求。在这方面,有必要指出的是,有大量的研究集中在其改进上,也有对业务架构模型的改进。作者试图使村庄、城市和其他潜在客户能够透明地将他们的目标、动机、请求等分配到一个准备好的环境/模型中。核心思想是使用建模语言ArchiMate 3.1。,并辅以IT本体的精选特征。
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引用次数: 0
Simulation Study of Thermo-Mechanical Properties of Power Transistor Embedded in PCB 嵌入式PCB中功率晶体管热力学性能的仿真研究
A. Chvála, J. Marek, A. Šatka, J. Chen
Thermo-mechanical simulation study of a power transistor embedded in a printed circuit board (PCB) is presented. The analysis is focused on the optimization of the design to improve the thermal and mechanical reliability performance of the system. Numerical simulations are effectively used in the identification of critical areas in the systems using power transistors embedded in the PCB, and their optimization with respect to lower mechanical strain and better heat transfer, both leading to improved reliability of the final system.
对嵌入式印刷电路板(PCB)中的功率晶体管进行了热力学仿真研究。分析的重点是优化设计,以提高系统的热可靠性和机械可靠性。数值模拟有效地应用于PCB内嵌功率晶体管系统中关键区域的识别,并对其进行优化,以降低机械应变和更好的传热,从而提高最终系统的可靠性。
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引用次数: 0
Transport properties of Si-doped $boldsymbol{beta}-mathbf{Ga}_{boldsymbol{2}}mathbf{O}_{boldsymbol{3}}$ grown by liquid-injection MOCVD 注液MOCVD制备si掺杂$boldsymbol{beta}-mathbf{Ga}_{boldsymbol{2}}mathbf{O}_{boldsymbol{3}}$的输运性质
F. Egyenes, F. Gucmann, E. Dobročka, M. Mikolasek, K. Hušeková, M. Ťapajna
Gallium oxide belongs to wide bandgap semiconducting materials with high power and high voltage capabilities. In this work, $Si-doped beta-Ga_2 O_3$ films were prepared using liquid injection metal organic chemical vapor deposition. Various growth conditions $(O_{2}$ flow in deposition chamber, Si-content in liquid precursor, and choice of $Ga$ precursor) were tested with an aim to improve transport properties needed for electronic devices. X-ray diffraction was applied to study structural properties of the films. Thin films underwent UV-VIS transmittance and ellipsometry optical measurements to determine thin films bandgap energies and thickness, respectively. Van der Pauw measurement was used to extract thin films resistivity. Influence of oxygen-poor and oxygen-rich atmosphere during the growth on films resistivity was discussed and indicated possible role of oxygen vacancies on the electron transport of the prepared films. Finally, optimal growth conditions suitable for electronic device manufacture were identified.
氧化镓属于宽禁带半导体材料,具有高功率和高电压性能。本文采用液体注入金属有机化学气相沉积法制备了$ si掺杂 β - ga_2 O_3$薄膜。为了改善电子器件所需的输运性能,测试了不同的生长条件(沉积室中O_{2}$流动,液体前驱体中si含量,以及$Ga$前驱体的选择)。用x射线衍射法研究了薄膜的结构特性。对薄膜进行紫外-可见透射率和椭偏光学测量,分别确定薄膜的带隙能和带隙厚度。采用范德保法提取薄膜电阻率。讨论了生长过程中贫氧和富氧气氛对薄膜电阻率的影响,并指出了氧空位对薄膜电子输运的可能作用。最后,确定了适合电子器件制造的最佳生长条件。
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引用次数: 0
A coupled model of heat spreading and flow boiling in microchannels 微通道内热传导与流动沸腾耦合模型
R. Betsema, C. Rops
The increasing waste heat density of chips requires advanced cooling technologies to prevent the chip from overheating. Two phase cooling in microchannels with a pin fin structure is a promising method which can extract high heat fluxes with a relatively low pressure drop. Current models to predict the performance of these devices typically assume a uniform heat flux along the flow direction. However, the local heat flux strongly depends on the local properties of the fluid and the local temperature in the adjacent heat spreader. This paper presents a novel model which couples a 2D analytical temperature field to a flow boiling model to obtain an accurate prediction of the boiling process and the maximum temperature at the chip interface. The effectiveness of the coupled model is demonstrated by an optimization study, which shows the sensitivity of design parameters on the maximum temperature.
芯片的废热密度不断增加,需要先进的冷却技术来防止芯片过热。针翅结构微通道的两相冷却是一种很有前途的方法,可以在较低的压降下获得较高的热流密度。目前预测这些装置性能的模型通常假设沿流动方向的热通量是均匀的。然而,局部热流密度很大程度上取决于流体的局部性质和邻近散热器的局部温度。本文提出了一种将二维解析温度场与流动沸腾模型耦合的新模型,以准确预测沸腾过程和切屑界面处的最高温度。通过优化研究验证了该耦合模型的有效性,表明了设计参数对最高温度的敏感性。
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引用次数: 0
Embedded Rogowski coil for wide bandwidth switch current monitoring 用于宽带宽开关电流监测的嵌入式Rogowski线圈
M. Minárik, J. Marek, A. Šatka
The increasing switching speed of wide-band semiconductor requires a high bandwidth current sensing solution. Rogowski coil sensor embedded in the power stage is one of the promising concepts in increasing the system reliability. In this work the design of embedded Rogowski coil is discussed and estimated parameters are experimentally verified.
随着宽带半导体开关速度的不断提高,需要一种高带宽电流传感解决方案。在电源级中嵌入Rogowski线圈传感器是提高系统可靠性的一个很有前途的概念。本文讨论了嵌入式Rogowski线圈的设计,并对估计的参数进行了实验验证。
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引用次数: 1
SiC Power TrenchMOS Transistor Under Repetitive Avalanche Stress 重复雪崩应力下的SiC功率沟槽mos晶体管
J. Marek, J. Kozarik, M. Minárik, A. Chvála, M. Matúš, L. Stuchlíková
This paper investigates the robustness and reliability issues of commercial 1.2-kV 4H-SiC MOSFETs under repetitive unclamped inductive switching (UIS). The degradation of device characteristics, including the transfer characteristics, drain leakage current $I_{dss}$, and output characteristics, is observed. A significant increase in leakage current was observed after relatively short avalanche stress (UIS stress), and device destruction occurred after 30 million of cycles. Besides the shift of static electrical characteristics, also a change in switching times was observed. The hot carriers injection and trapping into the gate oxide and its interfaces is believed to be responsible for the variation of electrical parameters.
本文研究了商用1.2 kv 4H-SiC mosfet在重复非箝位电感开关(UIS)下的鲁棒性和可靠性问题。观察到器件特性的退化,包括传输特性、漏极漏电流$I_{dss}$和输出特性。在相对较短的雪崩应力(UIS应力)后,泄漏电流显著增加,并且在3000万次循环后发生器件破坏。除了静电特性的变化外,还观察到开关时间的变化。热载流子注入和捕获栅极氧化物及其界面被认为是电气参数变化的原因。
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引用次数: 0
Energy Harvesting in Smart Access Systems - Review 智能接入系统中的能量收集-综述
V. Janicek, J. Kroutil, T. Teplý
This paper deals with an overview of mechanical-electrical systems used in generating electrical energy for the purpose of powering secondary systems controlling access control systems. In practice, we can meet them, for example, in administrative buildings, where they serve as sources of electricity for autonomous systems for the authorization of workers in the house. GaN transistors are also beginning to be used in this area and their use leads to higher energy gains.
本文概述了用于为控制门禁系统的二次系统供电的机电系统。在实践中,我们可以见到它们,例如,在行政大楼里,它们作为自主系统的电力来源,为房子里的工作人员提供授权。氮化镓晶体管也开始用于这一领域,它们的使用带来了更高的能量增益。
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引用次数: 0
Micro Power Supply Based on Piezoelectric Effect 基于压电效应的微电源
M. Husák, A. Budkova, T. Pycha, A. Laposa, V. Povolny, V. Janicek, J. Novak, A. Bouřa, J. Foit
The paper solves the model of the miniature Power supply based on the piezoelectric cantilever. The aim of the future is to further hybrid integration and use of nanotechnology. Contents of the article belongs to the category of renewable energy sources with environment energy conversion into electrical energy. The work is focused on the use in small temperature differences.
本文解决了基于压电悬臂梁的微型电源模型。未来的目标是进一步混合集成和使用纳米技术。本文内容属于可再生能源范畴,具有环境能转化为电能的特点。工作的重点是在小温差下的应用。
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2022 14th International Conference on Advanced Semiconductor Devices and Microsystems (ASDAM)
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