Gate-to-drain/source overlap and asymmetry effects on hot-carrier generation

P. Devoge, H. Aziza, P. Lorenzini, P. Masson, F. Julien, A. Marzaki, A. Malherbe, J. Delalleau, T. Cabout, A. Régnier, S. Niel
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Abstract

An investigation of the effects of gate-to-drain/source overlap length and overlap asymmetry on the electrical and hot-carrier generation behavior is conducted on a medium-voltage (around 3 to 5 V) transistor in a 40 nm CMOS technology, using TCAD simulations calibrated with electrical measurements. The substrate current versus gate voltage is used to monitor the hot-carrier impact ionization rate. A novel numerical approach of decomposing the substrate current into its drain-side and source-side constituents is proposed, allowing to determine the junction where most of the impact ionization occurs depending on the geometrical and electrical parameters.
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栅极-漏极/源重叠和不对称对热载流子产生的影响
在采用40 nm CMOS技术的中压(约3 ~ 5 V)晶体管上,利用电学测量校准的TCAD模拟,研究了栅极-漏极/源极重叠长度和重叠不对称对电学和热载流子生成行为的影响。衬底电流与栅极电压的关系被用来监测热载子冲击电离率。提出了一种将衬底电流分解为漏极侧和源极侧成分的新颖数值方法,允许根据几何和电气参数确定大多数冲击电离发生的结。
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