Fabrication of photodiode by screen printing technique

M. Yahaya, M. Salleh, T. K. Hoe
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引用次数: 5

Abstract

The photodiode is one of the most commonly used devices for photodetectors. Light absorption in the semiconductor produces electron-hole pairs in the depletion region which are separated by the electric field, leading to the flow of current in the external circuit. This paper describes preparation and characterization of photodiodes by the screen printing technique. Screen-printing is a cost effective thick film deposition method, where a paste containing the desired materials is printed on the substrate. The substrate is then fired under a controlled environment to yield devices bonded to the substrate. In this experiment, a layer of phosphorous thick films were deposited on the Si-substrate. Then, the p-n junction was formed by the usual doping via the diffusion method. The samples were characterized for the rectifier effect, quantum efficiency, response time and rise time. In the optimization process, samples were doped at temperatures from 800-1000/spl deg/C. It was found that samples doped at 900/spl deg/C had the highest speed and response time of 0.32 s and rise time of 0.48 s. This sample also has the highest responsivity and quantum efficiency. Problems in the thermal diffusion process and electrode design are described in detail.
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丝网印刷技术制造光电二极管
光电二极管是光电探测器中最常用的器件之一。半导体中的光吸收在耗尽区产生电子-空穴对,它们被电场分开,导致电流在外部电路中流动。本文介绍了用丝网印刷技术制备光电二极管并对其进行表征。丝网印刷是一种具有成本效益的厚膜沉积方法,其中包含所需材料的浆糊印刷在基材上。然后在受控环境下烧制基板以产生与基板结合的器件。本实验在硅衬底上沉积了一层磷厚膜。然后,通过扩散方法,采用常规掺杂形成p-n结。对样品进行了整流效应、量子效率、响应时间和上升时间的表征。在优化过程中,样品的掺杂温度为800-1000/spl℃。结果发现,在900/spl度/C掺杂时,样品的速度和响应时间最高,为0.32 s,上升时间为0.48 s。该样品也具有最高的响应率和量子效率。详细介绍了热扩散过程和电极设计中存在的问题。
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