Forming-free HfO2 bipolar RRAM device with improved endurance and high speed operation

Yu-Sheng Chen, T. Wu, P. Tzeng, Pang-Shiu Chen, Heng-Yuan Lee, Cha-Hsin Lin, Frederick T. Chen, M. Tsai
{"title":"Forming-free HfO2 bipolar RRAM device with improved endurance and high speed operation","authors":"Yu-Sheng Chen, T. Wu, P. Tzeng, Pang-Shiu Chen, Heng-Yuan Lee, Cha-Hsin Lin, Frederick T. Chen, M. Tsai","doi":"10.1109/VTSA.2009.5159281","DOIUrl":null,"url":null,"abstract":"A forming-free resistive memory of TiN/Ti/HfO2/TiN with a thin HfO2 film is demonstrated. The as-fabricated device can be operated without additional forming step to initiate the operation. This device with bipolar operation mode shows high speed (∼ 10 ns), robust endurance (≫ 106 times), good data retention (10-year lifetime), enough resistance ratio, and low power consumption. The simple structure and capability of multi-level operation demonstrate RRAM as a high-density memory in the near future.","PeriodicalId":309622,"journal":{"name":"2009 International Symposium on VLSI Technology, Systems, and Applications","volume":"38 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2009-04-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"38","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 International Symposium on VLSI Technology, Systems, and Applications","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/VTSA.2009.5159281","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 38

Abstract

A forming-free resistive memory of TiN/Ti/HfO2/TiN with a thin HfO2 film is demonstrated. The as-fabricated device can be operated without additional forming step to initiate the operation. This device with bipolar operation mode shows high speed (∼ 10 ns), robust endurance (≫ 106 times), good data retention (10-year lifetime), enough resistance ratio, and low power consumption. The simple structure and capability of multi-level operation demonstrate RRAM as a high-density memory in the near future.
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
无成形HfO2双极RRAM器件,提高了耐用性和高速运行
用HfO2薄膜制备了TiN/Ti/HfO2/TiN的无形成电阻存储器。制造后的装置无需额外的成形步骤即可启动操作。该双极工作模式器件具有高速(~ 10ns)、耐用性(~ 106倍)、数据保留性好(10年寿命)、电阻比高、功耗低等特点。简单的结构和多层次的操作能力证明了RRAM在不久的将来是一种高密度存储器。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 去求助
来源期刊
自引率
0.00%
发文量
0
期刊最新文献
High-k/ metal-gate stack work-function tuning by rare-earth capping layers: Interface dipole or bulk charge? Sub-100nm high-K metal gate GeOI pMOSFETs performance: Impact of the Ge channel orientation and of the source injection velocity Sub-32nm CMOS technology enhancement for low power applications Forming-free HfO2 bipolar RRAM device with improved endurance and high speed operation Inversion-type surface channel In0.53]Ga{in0.47As metal-oxide-semiconductor field-effect transistors with metal-gate/high-k dielectric stack and CMOS-compatible PdGe contacts
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1