{"title":"Effect of Anti-Reflective Coating for Si Optical Resonator Biosensors","authors":"J. Maeda, Riku Funamoto, Y. Amemiya, S. Yokoyama","doi":"10.1109/ISDCS.2019.8719100","DOIUrl":null,"url":null,"abstract":"We fabricated biosensors using silicon resonators for detection of biomaterials. The ripple caused by Fabry-Perot resonance is one of the big problems. In order to suppress this phenomenon, we applied the anti-reflective coating to the biosensor devices and examined its effect.","PeriodicalId":293660,"journal":{"name":"2019 2nd International Symposium on Devices, Circuits and Systems (ISDCS)","volume":"4 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 2nd International Symposium on Devices, Circuits and Systems (ISDCS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISDCS.2019.8719100","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
We fabricated biosensors using silicon resonators for detection of biomaterials. The ripple caused by Fabry-Perot resonance is one of the big problems. In order to suppress this phenomenon, we applied the anti-reflective coating to the biosensor devices and examined its effect.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
