R. Syms, M.M. Ahmad, I. Young, D. Gilderdale, D. Collins, M. Leach
{"title":"Batch fabrication of micro-coils for MR spectroscopy on silicon","authors":"R. Syms, M.M. Ahmad, I. Young, D. Gilderdale, D. Collins, M. Leach","doi":"10.1109/ICSENS.2005.1597677","DOIUrl":null,"url":null,"abstract":"A process for batch fabrication of low-cost microcoils for magnetic resonance (MR) spectroscopy of clinical biopsy samples is demonstrated. Conductors are fabricated on oxidized, intrinsic silicon substrates by electroplating metals inside a deep photoresist mould. Through-wafer deep reactive ion etching (DRIE) is used to define precise sample volumes and stencil cuts around each die, and dies are separated by snap-out. Single- and multiple-coil (Helmholtz-type) sensors are formed, by stacking parts on silicon baseplates. MR imaging and spectroscopy are both demonstrated on model samples, with high SNR","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2005-12-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Sensors, 2005.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSENS.2005.1597677","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 5
Abstract
A process for batch fabrication of low-cost microcoils for magnetic resonance (MR) spectroscopy of clinical biopsy samples is demonstrated. Conductors are fabricated on oxidized, intrinsic silicon substrates by electroplating metals inside a deep photoresist mould. Through-wafer deep reactive ion etching (DRIE) is used to define precise sample volumes and stencil cuts around each die, and dies are separated by snap-out. Single- and multiple-coil (Helmholtz-type) sensors are formed, by stacking parts on silicon baseplates. MR imaging and spectroscopy are both demonstrated on model samples, with high SNR
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