Pub Date : 2005-12-31DOI: 10.1109/ICSENS.2005.1597677
R. Syms, M.M. Ahmad, I. Young, D. Gilderdale, D. Collins, M. Leach
A process for batch fabrication of low-cost microcoils for magnetic resonance (MR) spectroscopy of clinical biopsy samples is demonstrated. Conductors are fabricated on oxidized, intrinsic silicon substrates by electroplating metals inside a deep photoresist mould. Through-wafer deep reactive ion etching (DRIE) is used to define precise sample volumes and stencil cuts around each die, and dies are separated by snap-out. Single- and multiple-coil (Helmholtz-type) sensors are formed, by stacking parts on silicon baseplates. MR imaging and spectroscopy are both demonstrated on model samples, with high SNR
{"title":"Batch fabrication of micro-coils for MR spectroscopy on silicon","authors":"R. Syms, M.M. Ahmad, I. Young, D. Gilderdale, D. Collins, M. Leach","doi":"10.1109/ICSENS.2005.1597677","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597677","url":null,"abstract":"A process for batch fabrication of low-cost microcoils for magnetic resonance (MR) spectroscopy of clinical biopsy samples is demonstrated. Conductors are fabricated on oxidized, intrinsic silicon substrates by electroplating metals inside a deep photoresist mould. Through-wafer deep reactive ion etching (DRIE) is used to define precise sample volumes and stencil cuts around each die, and dies are separated by snap-out. Single- and multiple-coil (Helmholtz-type) sensors are formed, by stacking parts on silicon baseplates. MR imaging and spectroscopy are both demonstrated on model samples, with high SNR","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-12-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115782312","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-12-01DOI: 10.1109/ICSENS.2005.1597865
Y. Yi, V. McDonell, J. Brouwer, M. Fujiwara, M. Adachi
High temperature fuel cells such as solid oxide fuel cells offer a high efficiency, fuel flexible, low emission strategy for distributed generation. In order to validate emissions performance of pollutants such as NOx and CO, analyzers that provide accurate measurements of low single digit values of these species are needed. Analyzer requirements are described along with representative results for low emission practical devices. The results demonstrate reliable analyzer performance and confirm low emission levels
{"title":"Emissions sensors for high temperature fuel cell applications","authors":"Y. Yi, V. McDonell, J. Brouwer, M. Fujiwara, M. Adachi","doi":"10.1109/ICSENS.2005.1597865","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597865","url":null,"abstract":"High temperature fuel cells such as solid oxide fuel cells offer a high efficiency, fuel flexible, low emission strategy for distributed generation. In order to validate emissions performance of pollutants such as NOx and CO, analyzers that provide accurate measurements of low single digit values of these species are needed. Analyzer requirements are described along with representative results for low emission practical devices. The results demonstrate reliable analyzer performance and confirm low emission levels","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127525511","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-12-01DOI: 10.1109/ICSENS.2005.1597971
R. K. Franklin, Matthew D. Johnson, Katharine A. Scott, J. Shim, H. Nam, D. Kipke, Richard B. Brown
We report for the first time a micromachined, silicon neural probe with an integrated iridium oxide (IrO) quasi reference electrode for neurochemical recordings. The probes have a 1.5 times 103 mum2 IrO reference electrode, a 1.5 times 103 mum2 Pt counter electrode, three circular Pt working electrodes, and three circular IrO electrodes for electrical recording. Several different electrode sizes (4 to 50 mum radius) were fabricated in order to study the effects of electrode size. In vitro evaluation of the probes demonstrated close correlation between results obtained using a Ag/AgCl reference electrode and the on-chip IrOx reference electrode
{"title":"Iridium oxide reference electrodes for neurochemical sensing with MEMS microelectrode arrays","authors":"R. K. Franklin, Matthew D. Johnson, Katharine A. Scott, J. Shim, H. Nam, D. Kipke, Richard B. Brown","doi":"10.1109/ICSENS.2005.1597971","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597971","url":null,"abstract":"We report for the first time a micromachined, silicon neural probe with an integrated iridium oxide (IrO) quasi reference electrode for neurochemical recordings. The probes have a 1.5 times 103 mum2 IrO reference electrode, a 1.5 times 103 mum2 Pt counter electrode, three circular Pt working electrodes, and three circular IrO electrodes for electrical recording. Several different electrode sizes (4 to 50 mum radius) were fabricated in order to study the effects of electrode size. In vitro evaluation of the probes demonstrated close correlation between results obtained using a Ag/AgCl reference electrode and the on-chip IrOx reference electrode","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116981659","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-12-01DOI: 10.1109/ICSENS.2005.1597909
A. Mahmood, D. Butler, Z. Çelik-Butler
This paper presents progress made in making device-level vacuum-packaged microbolometers as infrared detectors on flexible substrates. Polyimide PI5878G serves as the flexible substrate and semiconducting yttrium barium copper oxide (YBCO) is used as the bolometric material. Finite element analysis is used to design a vacuum cavity housing a microbolometer. Suitable materials are selected for the microcavity fabrication based on results of the computer simulations. During fabrication, sacrificial polyimide around the detector facilitates the formation of a vacuum microcavity with an optical window. Micromachining is carried out through trenches in the microcavity wall. After isolating the microbolometer from the ambient, the trenches are sealed shut by sputtering in vacuum. The fabricated devices are characterized for responsivity and detectivity. At a bias voltage of 10 V, 40-40mu m2 devices exhibited a current responsivity of 6.13 timesl0-5 A/W to a broad-band infrared radiation modulated at 5 Hz. A maximum detectivity of 1.76times105 cm-Hz1/2/W was measured. A relatively low thermal conductance of 3.36times10-6 W/K was measured implying good thermal isolation of the bolometers and therefore an intact vacuum cavity
本文介绍了在柔性衬底上制备器件级真空封装微辐射热计作为红外探测器的研究进展。聚酰亚胺PI5878G用作柔性衬底，半导体钇钡铜氧化物(YBCO)用作热测量材料。采用有限元分析方法设计了微辐射热计的真空腔体。根据计算机模拟的结果，选择了合适的材料来制作微腔。在制造过程中，牺牲聚酰亚胺周围的探测器有利于形成真空微腔与光学窗口。微加工是通过微腔壁上的沟槽进行的。将微辐射热计与周围环境隔离后，在真空中通过溅射封闭沟槽。所制备的器件具有响应性和探测性的特点。在偏置电压为10 V时，40-40 μ m2器件对5 Hz调制的宽带红外辐射的电流响应率为6.13倍(10 -5 a /W)。测得最大检出率为1.76倍(105 cm-Hz1/2/W)。测量到的相对较低的热导率为3.36倍10-6 W/K，这意味着热计具有良好的热隔离性，因此具有完整的真空腔
{"title":"Device level vacuum packaged micromachined infrared detectors on flexible substrates","authors":"A. Mahmood, D. Butler, Z. Çelik-Butler","doi":"10.1109/ICSENS.2005.1597909","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597909","url":null,"abstract":"This paper presents progress made in making device-level vacuum-packaged microbolometers as infrared detectors on flexible substrates. Polyimide PI5878G serves as the flexible substrate and semiconducting yttrium barium copper oxide (YBCO) is used as the bolometric material. Finite element analysis is used to design a vacuum cavity housing a microbolometer. Suitable materials are selected for the microcavity fabrication based on results of the computer simulations. During fabrication, sacrificial polyimide around the detector facilitates the formation of a vacuum microcavity with an optical window. Micromachining is carried out through trenches in the microcavity wall. After isolating the microbolometer from the ambient, the trenches are sealed shut by sputtering in vacuum. The fabricated devices are characterized for responsivity and detectivity. At a bias voltage of 10 V, 40-40mu m2 devices exhibited a current responsivity of 6.13 timesl0-5 A/W to a broad-band infrared radiation modulated at 5 Hz. A maximum detectivity of 1.76times105 cm-Hz1/2/W was measured. A relatively low thermal conductance of 3.36times10-6 W/K was measured implying good thermal isolation of the bolometers and therefore an intact vacuum cavity","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128407090","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597898
Dae-Hyun Kim, M. Feng
This paper presents a novel optical fiber accelerometer system for monitoring large-scale civil infrastructure such as utility lifelines, highway bridges, and buildings. Particularly suitable applications are in environments where conventional electric accelerometers cannot be used due to strong electromagnetic (EM) interference, electric spark-induced explosion risk, and cabling problems. The proposed optical fiber accelerometer represents a novel integration of the moire phenomena and fiber optics to achieve a robust performance in addition to its immunity to EM interference, easy cabling, and low cost. All of these make the proposed sensor ideal for applications in civil infrastructure monitoring. A prototype sensor system has been developed, together with a real-time signal processing software equipped with a unique compensation filter to increase the sensor's dynamic bandwidth. The experimental studies demonstrated the high-performance of the optical fiber sensor system
{"title":"A novel optical fiber accelerometer system for monitoring civil infrastructure","authors":"Dae-Hyun Kim, M. Feng","doi":"10.1109/ICSENS.2005.1597898","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597898","url":null,"abstract":"This paper presents a novel optical fiber accelerometer system for monitoring large-scale civil infrastructure such as utility lifelines, highway bridges, and buildings. Particularly suitable applications are in environments where conventional electric accelerometers cannot be used due to strong electromagnetic (EM) interference, electric spark-induced explosion risk, and cabling problems. The proposed optical fiber accelerometer represents a novel integration of the moire phenomena and fiber optics to achieve a robust performance in addition to its immunity to EM interference, easy cabling, and low cost. All of these make the proposed sensor ideal for applications in civil infrastructure monitoring. A prototype sensor system has been developed, together with a real-time signal processing software equipped with a unique compensation filter to increase the sensor's dynamic bandwidth. The experimental studies demonstrated the high-performance of the optical fiber sensor system","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"101 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114964339","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597839
Y. Matsui, Y. Miyoshi
The optoelectronic sensors with DOG (difference of Gaussian)-function characteristics have been developed successfully for the application to the artificial visual cortex. The remarkable negative photoinduced current (PIC) and negative differential (ND) characteristics according to the forward bias voltage have been obtained for GaAs/GaAlAs multi-quantum well (MQW) structures with a charge-storage layer of InAs/GaAs short period superlattice (SSL). The characteristics are dependent on the crystal quality of the charge-storage layer and extremely enhanced by using the InAs/GaAs SSL compared with InGaAs alloy. In addition, we have designed an optoelectronic sensing circuit to mimic the mechanism of the selectivity to orientation, motion-direction and length of slit light in a human visual cortex
{"title":"Charge-storage-type optoelectronic sensor with DOG-function characteristics","authors":"Y. Matsui, Y. Miyoshi","doi":"10.1109/ICSENS.2005.1597839","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597839","url":null,"abstract":"The optoelectronic sensors with DOG (difference of Gaussian)-function characteristics have been developed successfully for the application to the artificial visual cortex. The remarkable negative photoinduced current (PIC) and negative differential (ND) characteristics according to the forward bias voltage have been obtained for GaAs/GaAlAs multi-quantum well (MQW) structures with a charge-storage layer of InAs/GaAs short period superlattice (SSL). The characteristics are dependent on the crystal quality of the charge-storage layer and extremely enhanced by using the InAs/GaAs SSL compared with InGaAs alloy. In addition, we have designed an optoelectronic sensing circuit to mimic the mechanism of the selectivity to orientation, motion-direction and length of slit light in a human visual cortex","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"49 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115495635","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597779
P. Pattnaik, B. Vijayaaditya, Talabattula Srinivas, A. Selvarajan
In this paper we propose and analyse novel optical MEMS based pressure and vibration sensors utilising integrated optical ring resonators. The wavelength shift of light propagating in the resonator, located over the micro-mechanical structure, due to stress induced refractive change because of applied pressure or vibration, provides the desired sensor output. In the case of pressure sensor, as the circular diaphragm deflects due to the differential pressure, stress induced refractive index change in the waveguide lead to change in the wavelength shift providing the measure of pressure. For 1mm radius circular diaphragm with 65mum thickness, wavelength shift of 0.78 pm/kPa is obtained with a pressure range of 300 kPa. In the case of vibration sensor, the straight portion a race track resonator is located at the foot of a cantilever beam with proof mass. As the beam deflects due to vibration, stress induced refractive change in the waveguide located over the beam lead to the wavelength shift providing the measure of vibration. A wavelength shift of 3.19 pm/g in the range of 280 g for a cantilever beam of 1750 mum times 450 mum times 20 mum has been obtained. Since the wavelength of operation is around 1.55 mum, hybrid integration of source and detector is possible on the same substrate Also it is less amenable to noise as wavelength shift provides the sensor signal. This type of sensors can be used for precession instrumentation, aerospace application and other harsh environments with suitable design
在本文中，我们提出并分析了一种基于集成光学环形谐振器的新型光学MEMS压力和振动传感器。由于施加压力或振动引起的应力引起的折射率变化，在谐振器中传播的光的波长位移位于微机械结构上，从而提供所需的传感器输出。在压力传感器的情况下，当圆膜片由于压差而偏转时，波导中应力引起的折射率变化导致波长位移的变化，从而提供压力的测量。对于半径为1mm、厚度为65mum的圆膜片，在压力范围为300 kPa时，波长位移为0.78 pm/kPa。在振动传感器的情况下，赛道谐振器的直线部分位于具有证明质量的悬臂梁的底部。当光束由于振动而偏转时，位于光束上方的波导中的应力诱导折射变化导致波长位移，从而提供振动测量。在280 g范围内，1750 μ m × 450 μ m × 20 μ m的悬臂梁的波长位移为3.19 pm/g。由于工作波长约为1.55 μ m，因此可以在同一衬底上实现源和检测器的混合集成。此外，由于波长移位提供了传感器信号，因此不易受噪声的影响。这种类型的传感器可以用于进动仪器，航空航天应用和其他恶劣的环境，适当的设计
{"title":"Optical MEMS pressure and vibration sensors using integrated optical ring resonators","authors":"P. Pattnaik, B. Vijayaaditya, Talabattula Srinivas, A. Selvarajan","doi":"10.1109/ICSENS.2005.1597779","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597779","url":null,"abstract":"In this paper we propose and analyse novel optical MEMS based pressure and vibration sensors utilising integrated optical ring resonators. The wavelength shift of light propagating in the resonator, located over the micro-mechanical structure, due to stress induced refractive change because of applied pressure or vibration, provides the desired sensor output. In the case of pressure sensor, as the circular diaphragm deflects due to the differential pressure, stress induced refractive index change in the waveguide lead to change in the wavelength shift providing the measure of pressure. For 1mm radius circular diaphragm with 65mum thickness, wavelength shift of 0.78 pm/kPa is obtained with a pressure range of 300 kPa. In the case of vibration sensor, the straight portion a race track resonator is located at the foot of a cantilever beam with proof mass. As the beam deflects due to vibration, stress induced refractive change in the waveguide located over the beam lead to the wavelength shift providing the measure of vibration. A wavelength shift of 3.19 pm/g in the range of 280 g for a cantilever beam of 1750 mum times 450 mum times 20 mum has been obtained. Since the wavelength of operation is around 1.55 mum, hybrid integration of source and detector is possible on the same substrate Also it is less amenable to noise as wavelength shift provides the sensor signal. This type of sensors can be used for precession instrumentation, aerospace application and other harsh environments with suitable design","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124285927","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597753
A. Shkel, C. Acar, C. Painter
Micromachined vibratory gyroscopes (MVG) can be classified into two broad types, angle gyroscopes (or Type I) and rate gyroscopes (or Type II). Gyroscopes of the first type measure orientation angles directly, while gyroscopes of the second type measure rotational rate. Most MVG implementations to date are found exclusively in the angular rate measuring variety. This paper introduces a unified approach for description of MVGs, discusses design challenges, and introduces designs and experimental results demonstrating MVGs of both types. We demonstrate that even though challenging, Type I devices can be implemented using conventional micromachining technologies. This type of micromachined devices is new, unexplored, and may potentially enable high performance micro-scale gyros. Low-grade Type II gyroscopes have been already commercially successful. We summarize our results on Type II wide-bandwidth gyro concept and demonstrate that inherent robustness against parameter variation can be effectively achieved structurally, shifting the complexity from the control electronics to the structural design of Type II MVGs
{"title":"Two types of micromachined vibratory gyroscopes","authors":"A. Shkel, C. Acar, C. Painter","doi":"10.1109/ICSENS.2005.1597753","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597753","url":null,"abstract":"Micromachined vibratory gyroscopes (MVG) can be classified into two broad types, angle gyroscopes (or Type I) and rate gyroscopes (or Type II). Gyroscopes of the first type measure orientation angles directly, while gyroscopes of the second type measure rotational rate. Most MVG implementations to date are found exclusively in the angular rate measuring variety. This paper introduces a unified approach for description of MVGs, discusses design challenges, and introduces designs and experimental results demonstrating MVGs of both types. We demonstrate that even though challenging, Type I devices can be implemented using conventional micromachining technologies. This type of micromachined devices is new, unexplored, and may potentially enable high performance micro-scale gyros. Low-grade Type II gyroscopes have been already commercially successful. We summarize our results on Type II wide-bandwidth gyro concept and demonstrate that inherent robustness against parameter variation can be effectively achieved structurally, shifting the complexity from the control electronics to the structural design of Type II MVGs","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"17 9","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"120838186","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597641
W.G. Wu, Q. Chen, G. Yan, Y. Hao, D. Yin, Z.Y. Chen, A. Xu
A novel hybrid electrostatic actuator made up of a planar plate drive and a vertical comb drive is developed for actuating torsional micromirror. The device consisting of the actuator and an into-plane tiltable mirror is fabricated in SOI substrate based on bulk-and-surface mixed silicon micromachining. As demonstrated by experiment, the novel actuator can drive the mirror to achieve large-range continuous tilting as well as spontaneous 90deg tilting induced by the pull-in effect in a voltage control fashion. The continuous tilting range of the micromirror is increased to about 46deg. Both theoretical modeling and experimental observations indicate that, accompanying the increase in the continuous tilting range, the yielding voltage increases. The device has also been used as a mirror switch in an optical system, and the optical insertion loss is measured to be -1.98 dB
研制了一种由平面盘式驱动和垂直梳状驱动组成的混合静电致动器，用于扭转微镜的驱动。基于体面混合硅微加工技术，在SOI衬底上制作了由致动器和内倾镜组成的器件。实验表明，该驱动器既能驱动反射镜实现大范围连续倾斜，又能在电压控制下实现由拉入效应引起的90度自发倾斜。微镜的连续倾斜范围增加到约46度。理论模型和实验结果均表明，随着连续倾斜范围的增大，屈服电压也随之增大。该器件还在光学系统中用作镜像开关，测量到的光插入损耗为-1.98 dB
{"title":"Hybrid electrostatic actuator for micromirror tilting","authors":"W.G. Wu, Q. Chen, G. Yan, Y. Hao, D. Yin, Z.Y. Chen, A. Xu","doi":"10.1109/ICSENS.2005.1597641","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597641","url":null,"abstract":"A novel hybrid electrostatic actuator made up of a planar plate drive and a vertical comb drive is developed for actuating torsional micromirror. The device consisting of the actuator and an into-plane tiltable mirror is fabricated in SOI substrate based on bulk-and-surface mixed silicon micromachining. As demonstrated by experiment, the novel actuator can drive the mirror to achieve large-range continuous tilting as well as spontaneous 90deg tilting induced by the pull-in effect in a voltage control fashion. The continuous tilting range of the micromirror is increased to about 46deg. Both theoretical modeling and experimental observations indicate that, accompanying the increase in the continuous tilting range, the yielding voltage increases. The device has also been used as a mirror switch in an optical system, and the optical insertion loss is measured to be -1.98 dB","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127206333","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597625
K. Arshak, A. Arshak, D. Morris, O. Korostynska, E. Jafer
The ability to monitor pressure remotely is of particular importance in medical and environmental applications as it is less labour intensive, safer and offers peace of mind to the general public. To meet this demand, a prototype system using TiO2 thick film interdigitated capacitors has been developed. The circuit is based on the principle of capacitance-frequency-voltage conversion and has been designed to minimize power consumption. The sensor was tested under hydrostatic pressure ranging from 0-17 kPa and high sensitivity (DeltaV=47 mV) with low hysteresis (4 %) was recorded. It can be seen that this approach may provide cost effective, reliable devices for wireless sensing applications
{"title":"A Wireless Pressure Measurement System Based on TiO2 Interdigitated Sensors","authors":"K. Arshak, A. Arshak, D. Morris, O. Korostynska, E. Jafer","doi":"10.1109/ICSENS.2005.1597625","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597625","url":null,"abstract":"The ability to monitor pressure remotely is of particular importance in medical and environmental applications as it is less labour intensive, safer and offers peace of mind to the general public. To meet this demand, a prototype system using TiO2 thick film interdigitated capacitors has been developed. The circuit is based on the principle of capacitance-frequency-voltage conversion and has been designed to minimize power consumption. The sensor was tested under hydrostatic pressure ranging from 0-17 kPa and high sensitivity (DeltaV=47 mV) with low hysteresis (4 %) was recorded. It can be seen that this approach may provide cost effective, reliable devices for wireless sensing applications","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"141 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124732266","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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