Low power technology/circuit co-development for advanced mobile devices

G. Yeap
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Abstract

Technology options at 45nm and 32/28nm have been optimized for various mobile device applications. Disposable high performance technology is introduced to satisfy both high speed and low power requirement of modern convergence mobile computing and communication device. Dual Core Oxide scheme using SiON/Poly gate stack was used in 45nm. Scaled SiON/Poly gate stack is sufficient for 32/28nm low power/low cost technology, while HK/MG gate stack with strong process induced stress option is needed for high performance technology.
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先进移动设备的低功耗技术/电路联合开发
45nm和32/28nm的技术选项已针对各种移动设备应用进行了优化。为满足现代融合移动计算和通信设备的高速和低功耗要求,引入了一次性高性能技术。在45nm采用了采用硅/聚栅极叠加的双核氧化方案。对于32/28nm低功耗/低成本技术来说,缩放的硅/聚栅极堆栈是足够的,而对于高性能技术来说,需要具有强工艺诱导应力选项的HK/MG栅极堆栈。
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