Key factor for new technology transfer on the R&D cycle-time system

C. Yu-Chih, K. L. Young, J.Y. Chou
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Abstract

The new technology, process control and cycle time management in semiconductor manufacturing for the R&D (research and development department) is import and is a great challenge task, because of the numerous engineering holds, lot splits, and necessary experimental processes are executing continued. The other challenge is an R&D pilot line exist large variety of process technologies. Therefore, short cycle time for new technology or process to meet customer demand is difficult but must to achieve the mission of the goal. Forecast this goal, we had kicked off a cooperation plan which name is `R&D cycle time system' with R&D members cooperate to complete it. In this paper, we present the system that includes six effective factors that they can easy to find symptoms on a long cycle time, a process or a technology issue by layer, stage or step. We give they name of these six key handling factors as x-ratio RD,x-ratio FAB,x-ratio RD, x-ratio FAB,f-factor and R1-factor . These measurements can judge whether delivered a lot on time on a layer, a stage or step and the process and technology is stable or unstable on it. Specially, the measurement value of f-factor and f1-factor can suggest a process step of technology is maturity or not. They like the eyes on this complex and changeful process flow of the R&D, this system hope to be a useful tool for supporting R&D member to find out the process, technology and cycle time issues about this kind of a tough question
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研发周期时间系统中新技术转移的关键因素
半导体制造中的新技术、过程控制和周期管理对于研发部门来说是一项重要而又极具挑战性的任务,因为大量的工程项目、批次分割和必要的实验过程都在不断地进行。另一个挑战是研发中试线存在多种工艺技术。因此,短周期时间的新技术或新工艺要满足客户的需求是困难的,但必须实现的使命目标。为了实现这一目标,我们启动了一个名为“研发周期系统”的合作计划,由研发成员合作完成。在本文中,我们提出了一个包含六个有效因素的系统,这些因素可以在较长的周期时间、一个过程或一个技术问题上分层、分阶段或分步骤地容易发现症状。我们将这六个关键处理因素命名为x-ratio RD,x-ratio FAB,x-ratio RD,x-ratio FAB,f-factor和R1-factor。这些测量可以判断一个层、一个阶段或一个步骤是否按时交付,以及过程和技术在其上是稳定的还是不稳定的。特别是f因子和f1因子的测量值可以反映技术的一个过程步骤是否成熟。他们喜欢关注研发这一复杂多变的过程流程,本系统希望能成为一个有用的工具,帮助研发人员找出这类棘手问题的过程、技术和周期时间问题
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