An e-Diagnostics framework with security considerations for semiconductor factories

Abstract

In This work, new-generation software technologies and object-oriented technologies, such as Web services, XML signature, XML encryption, UML, etc., are used to develop an e-Diagnostics framework for semiconductor factories. The proposed framework can achieve the automaton of diagnostic processes and the integration of diagnostics information under a secure communication infrastructure. Specifically, several measures, such as single sign-on authentication and authorization, confirmation of data accuracy, assurance of information confidentiality, management of system users, and auditing of system operations, are designed to enhance the overall system security. The proposed framework can be applied to construct e-Diagnostics systems for the semiconductor industry.