S. Moon, Y. Han, Kuntae Kim, Seunghun Lee, H. Shin
{"title":"Enhanced Characteristics of V0.95W0.05OX-Based Uncooled Microbolometer","authors":"S. Moon, Y. Han, Kuntae Kim, Seunghun Lee, H. Shin","doi":"10.1109/ICSENS.2005.1597905","DOIUrl":null,"url":null,"abstract":"In this work, high-performance uncooled microbolometer was fabricated by using vanadium tungsten oxide as a infrared-sensitive material and its bolometric properties was characterized. As a bolometric material, the optimized V<sub>0.95</sub>W<sub>0.05</sub>O<sub>x</sub> thin film has a high TCR value over - 3.0%/K and low noise properties compared with VOx thin film. The fabricated V<sub>0.95</sub>W<sub>0.05</sub>O<sub>x</sub>-based microbolometer was vacuum-packaged and equipped with thermal electric cooler for the measurement of bolometric properties. The TCR value of the fabricated device was -3.49%/K at room temperature resistance of 71 kOmega and the measured thermal conductance was 6.1times10<sup>-7 </sup> W/K. Finally, we obtained high responsivity over 1.8times10<sup>4</sup> W/K and high detectivity over 1.3times10<sup>9</sup> cmHz<sup>frac12</sup>/W at a chopper frequency of 10 Hz and a bias current of 7.4 muA","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"164 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Sensors, 2005.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSENS.2005.1597905","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
In this work, high-performance uncooled microbolometer was fabricated by using vanadium tungsten oxide as a infrared-sensitive material and its bolometric properties was characterized. As a bolometric material, the optimized V0.95W0.05Ox thin film has a high TCR value over - 3.0%/K and low noise properties compared with VOx thin film. The fabricated V0.95W0.05Ox-based microbolometer was vacuum-packaged and equipped with thermal electric cooler for the measurement of bolometric properties. The TCR value of the fabricated device was -3.49%/K at room temperature resistance of 71 kOmega and the measured thermal conductance was 6.1times10-7 W/K. Finally, we obtained high responsivity over 1.8times104 W/K and high detectivity over 1.3times109 cmHzfrac12/W at a chopper frequency of 10 Hz and a bias current of 7.4 muA
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