Practical design of Love wave viscosity sensors using the eighth dimensional matrix formulation

IEEE Sensors, 2005. Pub Date : 2005-10-31 DOI:10.1109/ICSENS.2005.1597932

Yung-Yu Chen, Tsung-Tsong Wu

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Abstract

There are increasing research activities on Love wave devices in biochemical sensing application due to its high sensitivity and low acoustic damping. This paper aims at practical design of Love wave devices for liquid viscosity sensing based on effective permittivity approach and eighth dimension matrix formulation. First, we adopted the effective permittivity approach to calculate and discuss electromechanical coupling coefficient and temperature dependence of the 0th-order Love wave in ZnO/quartz layered structures. Besides, since the measured targets are liquid, reducing wave attenuation and increasing sensitivity become two important issues for the optimum design of a Love wave sensor. To take into account the effect of liquid viscosity on the device sensitivity, we adopted the eighth dimension matrix formulation to calculate phase velocity dispersion and wave attenuation of Love wave devices loaded with water. Finally, we also compared the calculated sensitivity with the existing experimental results. Results show that the proposed approach provided a satisfactory prediction of the device sensitivity of a Love wave liquid sensor

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基于八维矩阵公式的Love波粘度传感器的实用设计

由于Love波器件具有高灵敏度、低声阻尼等特点，在生化传感领域的应用研究日益增多。本文旨在基于有效介电常数法和八维矩阵公式的液体粘度测量Love波装置的实际设计。首先，我们采用有效介电常数法计算并讨论了ZnO/石英层状结构中0阶Love波的机电耦合系数和温度依赖性。此外，由于被测目标是液体，减小波衰减和提高灵敏度成为Love波传感器优化设计的两个重要问题。考虑到液体粘度对器件灵敏度的影响，我们采用八维矩阵公式计算载水Love波器件的相速度色散和波衰减。最后，我们还将计算的灵敏度与已有的实验结果进行了比较。结果表明，该方法能较好地预测Love波液体传感器的器件灵敏度

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IEEE Sensors, 2005.

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