Jinglong Li, C. Qi, Y. Che, Quande Zhang, Horse L. Ma, Jonathan Liu, M. Masuda, B. Liu
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引用次数: 0
Abstract
Ohmic contacts must be made in any semiconductor device or integrated circuits(IC). Contact failures usually are related to high resistance or open. However, sometimes the defective contact may be Schottky character instead of ohmic contact. In this paper, a case study on such a contact failure is discussed.
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