CMOS-based resonant sensors

Abstract

The paper provides an overview of resonant sensors based on CMOS technology. Applications of these sensors range from inertial sensors to chemical/biochemical sensors, from atomic force microscopy to high-frequency filters. CMOS technology enables to co-integrate the resonant microstructures with necessary analog and digital circuit functions. The paper discusses CMOS-based fabrication approaches for resonant sensors, possible sensing and actuation schemes, suitable resonator materials, geometries and vibration modes. Two CMOS-based microsystems are highlighted: (i) a resonant chemical sensor and (ii) a resonant magnetic field sensor