PBTI Study in Native High Voltage Device

B. Tsai, Z. Peng, H. Chuang, C. F. Chen, C. Hsu
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Abstract

The native HV device (w/o Vt implantation) and regular HV device (w/i Vt implantation) of PBTI Vt shift behaviors are investigated in this paper, and an envisioned mechanism is provided. Native HV device showed a high Vt shift at the beginning of Vg stress, the Ig-Vg curve measured supported this observation; also, the mismatch characterizations were also measured and compared in both native and regular HV devices.
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国产高压器件中PBTI的研究
本文研究了原生HV装置(w/o Vt注入)和常规HV装置(w/i Vt注入)对PBTI Vt移位行为的影响,并给出了设想的机理。原生HV装置在Vg应力开始时表现出较高的Vt位移,测量的Ig-Vg曲线支持这一观察结果;此外,还测量和比较了本地和常规高压器件中的失配特性。
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