{"title":"Analysis of polymeric singlemode waveguides for inter-system communication","authors":"David Weyers, K. Nieweglowski, L. Lorenz, K. Bock","doi":"10.23919/empc53418.2021.9584994","DOIUrl":null,"url":null,"abstract":"This paper describes simulation, technology- and process development for the manufacturing of single mode polymeric wave guides by photolithography. Simulations for single mode operation in O- and C-band are carried out. Waveguides are directly patterned with UV-photolithography using Ormocere®-material. Fiber to waveguide coupling and nearfield are characterized.","PeriodicalId":348887,"journal":{"name":"2021 23rd European Microelectronics and Packaging Conference & Exhibition (EMPC)","volume":"58 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-09-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2021 23rd European Microelectronics and Packaging Conference & Exhibition (EMPC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.23919/empc53418.2021.9584994","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
This paper describes simulation, technology- and process development for the manufacturing of single mode polymeric wave guides by photolithography. Simulations for single mode operation in O- and C-band are carried out. Waveguides are directly patterned with UV-photolithography using Ormocere®-material. Fiber to waveguide coupling and nearfield are characterized.
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