J. Spannhake, O. Schulz, A. Helwig, G. Miiller, T. Doll
{"title":"Design, development and operational concept of an advanced MEMS IR source for miniaturized gas sensor systems","authors":"J. Spannhake, O. Schulz, A. Helwig, G. Miiller, T. Doll","doi":"10.1109/ICSENS.2005.1597811","DOIUrl":null,"url":null,"abstract":"Miniaturized non-dispersive infrared (NDIR) gas sensing systems require as key components bright thermal infrared (IR) sources that can be modulated at reasonably high speed to allow high-sensitivity lock-in detection to be applied. In addition such sources should provide a stable emission naffected by both short-term environmental changes as well as long-term drift. As miniaturized light bulbs, widely used in commercial NDIR gas sensing systems, cannot fulfil these requirements we have developed miniaturized thermal IR emitters with built-in monitoring and self-test features","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"49 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"27","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Sensors, 2005.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSENS.2005.1597811","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 27
Abstract
Miniaturized non-dispersive infrared (NDIR) gas sensing systems require as key components bright thermal infrared (IR) sources that can be modulated at reasonably high speed to allow high-sensitivity lock-in detection to be applied. In addition such sources should provide a stable emission naffected by both short-term environmental changes as well as long-term drift. As miniaturized light bulbs, widely used in commercial NDIR gas sensing systems, cannot fulfil these requirements we have developed miniaturized thermal IR emitters with built-in monitoring and self-test features
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