{"title":"Study of Channeling and Self-Sputtering Effects of Ion Implantation - Data and Modeling","authors":"S. Qin","doi":"10.1109/WMED.2015.7093688","DOIUrl":null,"url":null,"abstract":"Channeling effect factor (CEF), self-sputtering effect, and amorphous (a-Si) layer thickness data as a function of ion mass (AMU) were measured and quantified by SIMS measurements, SRIM simulations, and HR-TEM measurements. Least squares fitting algorithm is used to fit measurement data. Good agreements between the modeling fitting curve and the measurement data are demonstrated. CEF is a logarithm function of the ion AMU. Self-sputtering is independent on the ion AMU for constant implant energy and dose. Amorphous (a-Si) layer thickness is a linear function of the ion AMU.","PeriodicalId":251088,"journal":{"name":"2015 IEEE Workshop on Microelectronics and Electron Devices (WMED)","volume":"43 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-03-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 IEEE Workshop on Microelectronics and Electron Devices (WMED)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/WMED.2015.7093688","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
Channeling effect factor (CEF), self-sputtering effect, and amorphous (a-Si) layer thickness data as a function of ion mass (AMU) were measured and quantified by SIMS measurements, SRIM simulations, and HR-TEM measurements. Least squares fitting algorithm is used to fit measurement data. Good agreements between the modeling fitting curve and the measurement data are demonstrated. CEF is a logarithm function of the ion AMU. Self-sputtering is independent on the ion AMU for constant implant energy and dose. Amorphous (a-Si) layer thickness is a linear function of the ion AMU.
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