Integration of RF MEMS resonators and phononic crystals for high frequency applications with frequency-selective heat management and efficient power handling

H. Campanella, Nan Wang, M. Narducci, J. Soon, C. Ho, Chengkuo Lee, A. Gu
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引用次数: 6

Abstract

We report a radio frequency micro electromechanical system (RFMEMS) device integrated with phononic crystals (PnC) that provide a Lamb-wave resonator with frequency-selective heat management, power handling capability, and more efficient electromechanical coupling at ultra high frequency (UHF) and low microwave bands. The integrated device is fabricated in a silicon-on-insulator (SOI) aluminum nitride (AlN) platform and boosts thermal performance by 40%, power handling by 3 dB, and coupling coefficient by three times. Design approach is scalable to higher frequencies.
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射频MEMS谐振器和声子晶体的集成,用于高频应用,具有频率选择性热管理和高效功率处理
我们报道了一种集成声子晶体(PnC)的射频微机电系统(RFMEMS)器件,该器件提供了具有频率选择性热管理,功率处理能力的兰姆波谐振器,并且在超高频(UHF)和低微波波段具有更高效的机电耦合。该集成器件是在绝缘体上硅(SOI)氮化铝(AlN)平台上制造的,其热性能提高了40%,功率处理提高了3 dB,耦合系数提高了3倍。设计方法可扩展到更高的频率。
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