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2014 IEEE International Electron Devices Meeting最新文献

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NBTI of Ge pMOSFETs: Understanding defects and enabling lifetime prediction Ge pmosfet的NBTI:了解缺陷和实现寿命预测
Pub Date : 2014-12-15 DOI: 10.1109/IEDM.2014.7047166
J. Ma, W. Zhang, J. F. Zhang, B. Benbakhti, Z. Ji, J. Mitard, J. Franco, B. Kaczer, G. Groeseneken
Conventional lifetime prediction method developed for Si is inapplicable to Ge devices. This work demonstrates that the defects are different in Ge and Si devices. Based on the investigation of defect difference, for the first time, a method is developed for Ge devices to restore the power law for NBTI kinetics, enabling lifetime prediction. This method is applicable for both GeO2/Ge and Sicap/Ge devices, assisting in further Ge process/device optimization.
传统的硅寿命预测方法不适用于锗器件。这项工作证明了锗和硅器件的缺陷是不同的。在缺陷差异研究的基础上,首次提出了一种Ge器件恢复NBTI动力学幂律的方法,实现了寿命预测。该方法适用于GeO2/Ge和Sicap/Ge器件,有助于进一步优化Ge工艺/器件。
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引用次数: 6
Hybrid CMOS/BEOL-NEMS technology for ultra-low-power IC applications 超低功耗集成电路应用的混合CMOS/BEOL-NEMS技术
Pub Date : 2014-12-01 DOI: 10.1109/IEDM.2014.7047130
N. Xu, Jeff Sun, I. Chen, L. Hutin, Yenhao Chen, J. Fujiki, Chuang Qian, T. Liu
Three-dimensional (3-D) nano-electro-mechanical (NEM) switches (relays) are proposed to reduce the die area and power consumption of digital logic and memory circuits.
为了减少数字逻辑与存储电路的芯片面积和功耗,提出了三维纳米机电开关(继电器)。
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引用次数: 46
Area dependence of thermal stability factor in perpendicular STT-MRAM analyzed by bi-directional data flipping model 用双向数据翻转模型分析垂直STT-MRAM热稳定因子的面积依赖性
Pub Date : 2014-12-01 DOI: 10.1109/IEDM.2014.7047082
K. Tsunoda, M. Aoki, H. Noshiro, Y. Iba, S. Fukuda, C. Yoshida, Y. Yamazaki, A. Takahashi, A. Hatada, M. Nakabayashi, Y. Tsuzaki, T. Sugii
We report a statistical analysis of the thermal stability factor (Δ) for the top-pinned perpendicular magnetic tunnel junction (p-MTJ). By using a bi-directional data flipping model, the data retention characteristics of the “0” and “1” states can be fitted separately, including the saturation of failure probability. With the help of a resistance evaluation for the 16-kbit MTJ array, it became clear that the Δ of the “1” state increased as the device area increased, whereas the Δ of the “0” state remains constant regardless of the size. Moreover, we found that the p-MTJ exhibited a much smaller variation of Δ (9.6 ~ 14.3%) compared with the in-plane MTJ. Variations of Δ in both states decreased as the area increased. In combination with an intense magnetic measurement for the discrete monitor devices, the key parameter to increase the Δ and suppress its variation was investigated.
我们报告了顶钉垂直磁隧道结(p-MTJ)的热稳定因子(Δ)的统计分析。利用双向数据翻转模型,可以分别拟合“0”和“1”状态的数据保留特征,包括失效概率的饱和。借助对16 kbit MTJ阵列的电阻评估,很明显,“1”状态的Δ随着器件面积的增加而增加,而“0”状态的Δ无论尺寸如何都保持不变。此外,与面内MTJ相比,p-MTJ的变化幅度Δ(9.6 ~ 14.3%)要小得多。随着面积的增加,两州Δ的变化都减小了。结合对离散监测装置的强磁测量,研究了增大Δ并抑制其变化的关键参数。
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引用次数: 11
A new surface potential-based compact model for a-IGZO TFTs in RFID applications 一种新的基于表面电位的A - igzo TFTs在RFID应用中的紧凑模型
Pub Date : 2014-12-01 DOI: 10.1109/IEDM.2014.7047176
Z. Zong, Ling Li, Jin Jang, Zhigang Li, Nianduan Lu, Liwei Shang, Z. Ji, Ming Liu
For the first time, we present a surface potential-based compact model for a-IGZO TFTs based on multiple trapping-release theory and benchmark our work against device measurements. This model does not require time-consuming calculation. Meanwhile, we have developed the automatic parameter extraction program, which can extract the parameters rapidly and accurately. Moreover, the compact model is coded in Verilog-A, and implemented in a vendor CAD environment. This model provides physics-based consistent description of DC and AC device characteristics and enables accurate circuit-level performance prediction and RFID circuit design of a-IGZO TFTs.
我们首次提出了基于多次捕获-释放理论的基于表面电位的a- igzo TFTs紧凑模型,并根据器件测量对我们的工作进行了基准测试。这个模型不需要耗时的计算。同时,我们开发了自动参数提取程序,可以快速准确地提取出参数。此外,紧凑的模型在Verilog-A中编码,并在供应商CAD环境中实现。该模型提供了基于物理的直流和交流器件特性的一致描述,并实现了精确的电路级性能预测和a-IGZO TFTs的RFID电路设计。
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引用次数: 15
Application specific trade-offs for WBG SiC, GaN and high end Si power switch technologies WBG SiC, GaN和高端Si功率开关技术的特定应用权衡
Pub Date : 2014-12-01 DOI: 10.1109/IEDM.2014.7046965
R. Rupp, T. Laska, O. Haberlen, M. Treu
There is an increasing choice of power switches in the 600V to 1700V range for the application engineers. Besides the well-established Si SJ (Super Junction) MOSFETs and IGBTs now also silicon carbide (SiC) and latest gallium nitride (GaN) power switches are available for new designs. Complete new system optimizations are possible driven by totally different trade off options e.g. between static and dynamic losses and their temperature dependencies. In this paper we explain these trade-offs for the different device types and show the consequences based on some prominent sample applications.
对于应用工程师来说,600V到1700V范围内的电源开关选择越来越多。除了完善的Si SJ(超级结)mosfet和igbt外,现在碳化硅(SiC)和最新的氮化镓(GaN)功率开关也可用于新设计。全新的系统优化可能由完全不同的权衡选项驱动,例如在静态和动态损耗及其温度依赖性之间进行权衡。在本文中,我们解释了不同设备类型的这些权衡,并基于一些突出的示例应用程序展示了结果。
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引用次数: 32
Pairwise coupled hybrid vanadium dioxide-MOSFET (HVFET) oscillators for non-boolean associative computing 用于非布尔关联计算的二氧化钒- mosfet (HVFET)双耦合振荡器
Pub Date : 2014-12-01 DOI: 10.1109/IEDM.2014.7047129
N. Shukla, A. Parihar, M. Cotter, M. Barth, Xueqing Li, Nandhini Chandramoorthy, H. Paik, D. Schlom, V. Narayanan, A. Raychowdhury, Suman Datta
Information processing applications related to associative computing like image / pattern recognition consume excessive computational resources in the Boolean processing framework. This motivates the exploration of a non-Boolean computing approach for such applications. In this work, we demonstrate, (i) novel hybrid set of pair-wise coupled oscillators comprising of vanadium dioxide (VO2) metal-insulator-transition (MIT) system integrated with MOSFET; (ii) degree of synchronization between oscillators based on input analog voltage difference; (iii) implementation of hardware platform for fast and efficient evaluation of Lk fractional distance norm (k<;1); (iv) improved quality of image processing and ~20X lower power consumption of the coupled oscillators over a CMOS accelerator.
与图像/模式识别等关联计算相关的信息处理应用在布尔处理框架中消耗了过多的计算资源。这激发了对此类应用程序的非布尔计算方法的探索。在这项工作中,我们展示了(i)由二氧化钒(VO2)金属-绝缘体-过渡(MIT)系统与MOSFET集成组成的新型成对耦合振荡器组合;(ii)基于输入模拟电压差的振荡器之间的同步程度;(iii)实现快速高效求Lk分数距离范数(k<;1)的硬件平台;(iv)与CMOS加速器相比,图像处理质量提高,耦合振荡器功耗降低约20倍。
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引用次数: 69
MOS Capacitor Deep Trench Isolation for CMOS image sensors 用于CMOS图像传感器的MOS电容深沟隔离
Pub Date : 2014-12-01 DOI: 10.1109/IEDM.2014.7046979
N. Ahmed, F. Roy, G. Lu, B. Mamdy, J. Carrere, A. Tournier, N. Virollet, C. Perrot, M. Rivoire, A. Seignard, D. Pellissier-Tanon, F. Leverd, B. Orlando
This paper proposes the integration of MOS Capacitor Deep Trench Isolation (CDTI) as a solution to boost image sensors' pixels performances. We have investigated CDTI and compared it to oxide-filled Deep Trench Isolation (DTI) configurations, on silicon samples, with a fabrication based on TCAD simulations. The experiment measurements evaluated on CDTI without Sidewall Implantation (SWI) exhibit very low dark current (~1aA at 60°C for a 1.4μm pixel), high full-well capacity (~12000e-), and it shows quantum efficiency improvement compared to DTI configuration. Pixels with optimized CDTI gate oxide thickness have demonstrated comparable angular response to oxide-filled DTI counterparts.
本文提出了集成MOS电容深沟隔离(CDTI)作为提高图像传感器像素性能的一种解决方案。我们研究了CDTI,并将其与硅样品上的氧化填充深沟隔离(DTI)结构进行了比较,并基于TCAD模拟进行了制造。在没有侧壁注入(SWI)的CDTI上进行的实验测量显示,与DTI结构相比,它具有非常低的暗电流(在60°C下为1.4μm像素~1aA),高的全阱容量(~12000e-),并且量子效率有所提高。具有优化的CDTI栅极氧化物厚度的像素显示出与填充氧化物的DTI对应物相当的角响应。
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引用次数: 21
Integration of RF MEMS resonators and phononic crystals for high frequency applications with frequency-selective heat management and efficient power handling 射频MEMS谐振器和声子晶体的集成,用于高频应用,具有频率选择性热管理和高效功率处理
Pub Date : 2014-12-01 DOI: 10.1109/IEDM.2014.7047102
H. Campanella, Nan Wang, M. Narducci, J. Soon, C. Ho, Chengkuo Lee, A. Gu
We report a radio frequency micro electromechanical system (RFMEMS) device integrated with phononic crystals (PnC) that provide a Lamb-wave resonator with frequency-selective heat management, power handling capability, and more efficient electromechanical coupling at ultra high frequency (UHF) and low microwave bands. The integrated device is fabricated in a silicon-on-insulator (SOI) aluminum nitride (AlN) platform and boosts thermal performance by 40%, power handling by 3 dB, and coupling coefficient by three times. Design approach is scalable to higher frequencies.
我们报道了一种集成声子晶体(PnC)的射频微机电系统(RFMEMS)器件,该器件提供了具有频率选择性热管理,功率处理能力的兰姆波谐振器,并且在超高频(UHF)和低微波波段具有更高效的机电耦合。该集成器件是在绝缘体上硅(SOI)氮化铝(AlN)平台上制造的,其热性能提高了40%,功率处理提高了3 dB,耦合系数提高了3倍。设计方法可扩展到更高的频率。
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引用次数: 6
New observations on hot carrier induced dynamic variation in nano-scaled SiON/poly, HK/MG and FinFET devices based on on-the-fly HCI technique: The role of single trap induced degradation 基于动态HCI技术的热载流子诱导纳米级SiON/poly、HK/MG和FinFET器件动态变化的新观察:单阱诱导降解的作用
Pub Date : 2014-12-01 DOI: 10.1109/IEDM.2014.7047170
Changze Liu, Kyongtaek Lee, S. Pae, Jongwoo Park
In this paper, HCI induced dynamic variation in nano-scaled MOSFETs is systematically studied. Based on the proposed on-the-fly HCI technique, individual defect related HCI variation in small area device is observed for the first time. The fundamental properties of HCI variation sources (single trap induced degradation and trap number) are further investigated. The results show universal scaling trend for all the SiON/Poly, HK/MG and FinFET devices which confirms that the device dimension scaling is the dominant factor for the enhanced individual trap effect. Based on the new observations, HCI variation model is further discussed for the accurate prediction for design. Moreover, HCI variation is compared with BTI and RTN in terms of individual trap. The results show that HCI effect has the largest single trap impacts, which implies the defects responsible for HCI could be closer to dielectric-silicon interface than that for BTI and RTN.
本文系统地研究了HCI诱导的纳米级mosfet的动态变化。基于所提出的动态HCI技术,首次观察到小面积器件中单个缺陷相关的HCI变化。进一步研究了HCI变化源的基本特性(单阱诱导降解和阱数)。结果表明,所有的SiON/Poly、HK/MG和FinFET器件都有普遍的尺度化趋势,这证实了器件尺寸的尺度化是单个陷阱效应增强的主要因素。在此基础上,进一步探讨了HCI变化模型对设计的准确预测。此外,从单个陷阱的角度比较了HCI与BTI和RTN的变化。结果表明,HCI效应具有最大的单阱影响,这意味着HCI缺陷可能比BTI和RTN缺陷更接近介电硅界面。
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引用次数: 18
Experimental and theoretical understanding of Forming, SET and RESET operations in Conductive Bridge RAM (CBRAM) for memory stack optimization 导电桥式随机存取存储器(CBRAM)中成形、SET和RESET操作的实验和理论理解
Pub Date : 2014-12-01 DOI: 10.1109/IEDM.2014.7046997
J. Guy, G. Molas, P. Blaise, C. Carabasse, M. Bernard, A. Roule, G. Carval, Veronique Sousa, H. Grampeix, V. Delaye, A. Toffoli, J. Cluzel, P. Brianceau, O. Pollet, V. Balan, S. Barraud, O. Cueto, Gérard Ghibaudo, F. Clermidy, B. D. Salvo, L. Perniola
In this paper, we deeply investigate for the 1st time at our knowledge the impact of the CBRAM memory stack on the Forming, SET and RESET operations. Kinetic Monte Carlo simulations, based on inputs from ab-initio calculations and taking into account ionic hopping and chemical reaction dynamics are used to analyse experimental results obtained on decananometric devices. We propose guidelines to optimize the CBRAM stack, targeting Forming voltage reduction, improved trade-off between SET speed and disturb immunity (time voltage dilemma) and window margin increase (RESET efficiency).
在本文中,我们第一次深入研究了CBRAM内存堆栈对成形、SET和RESET操作的影响。动力学蒙特卡罗模拟,基于从从头算输入,并考虑到离子跳跃和化学反应动力学是用来分析实验结果得到的decananometric装置。我们提出了优化CBRAM堆栈的指导方针,目标是降低成形电压,改善SET速度和干扰抗扰度(时间电压困境)之间的权衡,以及增加窗口裕度(RESET效率)。
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引用次数: 29
期刊
2014 IEEE International Electron Devices Meeting
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