A 300-mm-wafer silicon photonics technology for advanced information systems

Abstract

State-of-the-art 300-mm-wafer-based silicon photonics technology features superior fabrication accuracy, in-wafer uniformity, and reproducibility. Using this technology, various photonic devices, such as a large-scale optical switch matrix with a very low energy consumption, high-efficiency optical modulators, are developed for energy-efficient network systems. Novel functional photonic circuits, such as those for optical path-gate logic processing are now being developed. These photonic devices and circuits will be key elements in the energy-efficient and advanced information systems.