{"title":"Recent Developments for the Characterization of Crystals and Defects at the Nanoscale using On-Axis TKD in SEM","authors":"D. Goran, T. Schwager, A. Fanta","doi":"10.31399/asm.cp.istfa2021p0217","DOIUrl":null,"url":null,"abstract":"\n The development of advanced nanomaterials and nanodevices is dependent on the availability of powerful and reliable characterization techniques. In this context, we developed hardware and software capabilities to help push the spatial resolution limit during orientation mapping in a Scanning Electron Microscope (SEM).","PeriodicalId":188323,"journal":{"name":"ISTFA 2021: Conference Proceedings from the 47th International Symposium for Testing and Failure Analysis","volume":"34 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"ISTFA 2021: Conference Proceedings from the 47th International Symposium for Testing and Failure Analysis","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.31399/asm.cp.istfa2021p0217","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The development of advanced nanomaterials and nanodevices is dependent on the availability of powerful and reliable characterization techniques. In this context, we developed hardware and software capabilities to help push the spatial resolution limit during orientation mapping in a Scanning Electron Microscope (SEM).
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