Chun-Hung Tsai, Yu-Chung Lin, C. Hsu, Rong-Tian Cheng, C. Chang, Yung-Chao Lin, Po-Jen Chao
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Abstract
This paper discusses considerations in choosing a chemical supply system for semiconductor fabs. We investigate the characteristics of three major supply systems, drum, lorry and dilution system. The initial costs and footprints are totally different among them. Based on the cost analysis, this paper provides a simple criterion of using the lorry supply system. Besides discussion, information of leading fabs in each field is benchmarked in this paper
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