Light-Illumination-Induced Degradation and Its Long-Term Recovery in Indium-Tin-Zinc Oxide Thin-Film Transistors

Meng Zhang, Xiaotong Ma, Zhendong Jiang, Sunbin Deng, Guijun Li, Rongsheng Chen, Yan Yan, M. Wong, H. Kwok
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引用次数: 1

Abstract

Light-illumination-induced degradation and its long-term recovery in indium-tin-zinc oxide (ITZO) thin-film transistors (TFTs) are investigated. Negative threshold voltage shift and subthreshold degradation are observed under light of 546.1 nm with 14.92 mW/cm2. Short-term recovery and long-term recovery of ITZO TFT exhibit two different characteristics. Incorporated with TCAD simulations, the degradation mechanism and recovery mechanism are tentatively discussed.
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铟锡锌氧化物薄膜晶体管的光致降解及其长期恢复
研究了铟锡锌氧化物(ITZO)薄膜晶体管(TFTs)的光致降解及其长期恢复。在546.1 nm和14.92 mW/cm2的光下观察到负阈值电压偏移和亚阈值退化。ITZO TFT的短期恢复和长期恢复表现出两种不同的特征。结合TCAD仿真,对其降解机理和回收机理进行了初步探讨。
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