Assembly of MEMS micro mirrors pair system in a single module

Abstract

MEMS mirrors are among the most promising devices for the new wave of MEMS actuator devices. The general purpose of the devices(s) is to deviate a laser beam and scan a two-dimensional target. To limit the complexity of design and to maximize performances on both axes of scan, two different mirrors are chosen that then need to be coupled mechanically and optically to perform the dual scanning. This paper presents a low cost, high performance, high mass production process capable solution, for a dual mirror single package system.