Investigation of GaAs/AlGaAs multiquantum well infrared detector

Jinmin Li, Haiqun Zheng, Yiping Zeng, M. Kong
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Abstract

In this article, we present the experimental results of a 130 unit GaAs/AlGaAs quantum well infrared detector line-array with front-side normal illumination based on a waveguide of a doubly periodic grating coupler. The detector array has achieved a broad spectral response by optimizing the quantum well structures and device processes.
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GaAs/AlGaAs多量子阱红外探测器的研究
本文介绍了基于双周期光栅耦合器波导的130单元GaAs/AlGaAs量子阱红外探测器线阵的实验结果。该探测器阵列通过优化量子阱结构和器件工艺实现了广谱响应。
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