Comparison between recoverable and permanent NBTI variability components

D. Nouguier, M. Rafik, X. Federspiel, G. Ghibaudo
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引用次数: 4

Abstract

In this paper, we present a statistical analysis of recoverable and permanent NBTI components. Measurements are performed on PFET devices issued from ST Microelectronics 28nm FDSOI technology, covering a wide range of device dimensions W and L. We analyzed NBTI degradation and recovery measured at μs time scale, resulting from AC and DC stress. We were able to confront VTh drift variability during stress and relaxation phase and evidence significant differences of variability between stress and relaxation phase.
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可恢复和永久NBTI变率分量的比较
本文对可恢复的和永久的NBTI分量进行了统计分析。在意法半导体28nm FDSOI技术生产的pet器件上进行了测量,涵盖了广泛的器件尺寸W和l。我们分析了在μs时间尺度上测量的NBTI在交流和直流应力下的降解和恢复。我们能够面对应力和松弛阶段的VTh漂移变异性,并证明应力和松弛阶段的变异性存在显著差异。
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