J. Zaal, F. Santagata, W. V. van Driel, G.Q. Zhang, J. Creemer, P. Sarro
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引用次数: 0
Abstract
An increasing number of semiconductor companies have research programs related to MEMS products. This can be explained by the wide variety of application areas for MEMS, some mechanical MEMS examples are: filters [1], oscillators [2,3], pressure sensors [4], particle detection [5], thermometers [6] and gyroscopes [7].
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