{"title":"Impact of Chuck Boundary Conditions on Wideband On-Wafer Measurements","authors":"G. Phung, U. Arz","doi":"10.1109/SPI52361.2021.9505192","DOIUrl":null,"url":null,"abstract":"While a lot of investigations have been presented recently explaining the parasitic effects in on-wafer measurements caused by probes, neighborhood and environmental effects, this paper addresses the impact of chuck boundary conditions. Starting from a coplanar waveguide (CPW) measurement example, this paper demonstrates how the most relevant chuck parameters, i.e. thickness and relative permittivity, deteriorate the S-parameters of CPWs.","PeriodicalId":440368,"journal":{"name":"2021 IEEE 25th Workshop on Signal and Power Integrity (SPI)","volume":"2 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-05-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2021 IEEE 25th Workshop on Signal and Power Integrity (SPI)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SPI52361.2021.9505192","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
While a lot of investigations have been presented recently explaining the parasitic effects in on-wafer measurements caused by probes, neighborhood and environmental effects, this paper addresses the impact of chuck boundary conditions. Starting from a coplanar waveguide (CPW) measurement example, this paper demonstrates how the most relevant chuck parameters, i.e. thickness and relative permittivity, deteriorate the S-parameters of CPWs.
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