{"title":"Critical area based yield modeling on an advanced microprocessor design","authors":"J. Segal, S. Parker, S. Bakarian, J. Pak","doi":"10.1109/ISSM.2000.993646","DOIUrl":null,"url":null,"abstract":"Critical area analysis was performed on a complex microprocessor design. (>1 Gbyte GDS file). The following applications of critical area analysis are demonstrated: yield partitioning by process layer, yield partitioning by layout block, and design for manufacturability. Advanced features such as netlist extraction, layer shift operation, and geometric expansion compared to Monte Carlo critical area extraction are discussed.","PeriodicalId":104122,"journal":{"name":"Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130)","volume":"37 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-09-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISSM.2000.993646","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 4
Abstract
Critical area analysis was performed on a complex microprocessor design. (>1 Gbyte GDS file). The following applications of critical area analysis are demonstrated: yield partitioning by process layer, yield partitioning by layout block, and design for manufacturability. Advanced features such as netlist extraction, layer shift operation, and geometric expansion compared to Monte Carlo critical area extraction are discussed.
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