{"title":"MEMS inertial sensor toward higher accuracy & multi-axis sensing","authors":"S. Nakamura","doi":"10.1109/ICSENS.2005.1597855","DOIUrl":null,"url":null,"abstract":"This paper reports MEMS inertial sensor which is based on the principle of a rotational gyroscope can detect both 3-axis acceleration and 2-axis angular rate at a time by electrostatically suspending and rotating rotor in the shape of a ring made from silicon. The device has several advantages: the levitation of the rotor in a vacuum eliminates a mechanical friction resulting in high sensitivity; the position control for the levitation allows to sense accelerations in tri-axis. Latest measurements yield noise level of gyro and that of accelerometer as low as 0.002deg/s/Hzfrac12 and 20 muG/Hzfrac12, with 1.5mm diameter rotor at 74,000rpm","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"196 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"48","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Sensors, 2005.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSENS.2005.1597855","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 48
Abstract
This paper reports MEMS inertial sensor which is based on the principle of a rotational gyroscope can detect both 3-axis acceleration and 2-axis angular rate at a time by electrostatically suspending and rotating rotor in the shape of a ring made from silicon. The device has several advantages: the levitation of the rotor in a vacuum eliminates a mechanical friction resulting in high sensitivity; the position control for the levitation allows to sense accelerations in tri-axis. Latest measurements yield noise level of gyro and that of accelerometer as low as 0.002deg/s/Hzfrac12 and 20 muG/Hzfrac12, with 1.5mm diameter rotor at 74,000rpm
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