{"title":"Optoelectronic microswitch on SOI based structure","authors":"S. Chouteau, J. Boussey, B. Cabon, A. Iliadis","doi":"10.1109/SOI.1995.526450","DOIUrl":null,"url":null,"abstract":"Optical waveguiding in BESOI (Bond and Etch back Silicon On Insulator) structures is investigated as a command tool for microwave signal transmission in coplanar lines. This paper reports the formation and the propagation characteristics of an optoelectronic microwave microswitch.","PeriodicalId":149490,"journal":{"name":"1995 IEEE International SOI Conference Proceedings","volume":"5 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1995-10-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"9","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"1995 IEEE International SOI Conference Proceedings","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SOI.1995.526450","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 9
Abstract
Optical waveguiding in BESOI (Bond and Etch back Silicon On Insulator) structures is investigated as a command tool for microwave signal transmission in coplanar lines. This paper reports the formation and the propagation characteristics of an optoelectronic microwave microswitch.
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