Comparative Study of Total Ionizing Dose Effects on the Silicon-Controlled Rectifier Devices for HV and LV ESD Protections

Zhuojun Chen, Wenzhao Lu, Ming Wu, W. Peng, Yun Zeng, Xiangliang Jin
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Abstract

In this paper, the total ionizing dose (TID) effects on low voltage triggering silicon controlled rectifier (LVTSCR) and LDMOS-SCR are studied for low voltage (LV) and high voltage (HV) ESD protections, respectively. They are fabricated in a 5V/24V 0.5-μm CDMOS process and exposed to 60Co gamma rays up to 200 krad(Si). The transmission line pulse (TLP) tests are performed before and after irradiation, and then the ESD performances are compared and discussed.
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高压和低压ESD防护用可控硅整流器总电离剂量效应的比较研究
本文研究了总电离剂量(TID)对低压触发可控硅整流器(LVTSCR)和LDMOS-SCR的影响,分别用于低压和高压ESD保护。它们是在5V/24V 0.5 μm CDMOS工艺中制造的,并暴露在高达200 krad(Si)的60Co伽马射线中。在辐照前后进行了传输线脉冲(TLP)测试,并对辐照前后的ESD性能进行了比较和讨论。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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