Monolithically Integrated Optoelectronic Transmitter based on Segmented Mach-Zehnder Modulator in EPIC 250 nm BiCMOS Technology

Festim Iseini, M. Inac, A. Malignaggi, A. Peczek, G. Kahmen
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Abstract

This paper presents a monolithically integrated optoelectronic transmitter based on a segmented Mach-Zehnder modulator. The chip is fabricated in the 250nmSiGe BiCMOS SG25H5 EPIC technology developed at IHP, a silicon-photonic technology combining 0.25 $\mu$m CMOS, high-performance npn HBTs (featuring $\mathrm{f}_{\mathrm{t}}$/fmax of 210/290 GHz), and a full photonic device set for C/O-band. The chip includes a linear electrical driver, a 5 segments Mach-Zehnder modulator, for a total phase shifter length of 2 mm. Electro-optical time-domain measurements demonstrate open eye diagrams up to 44 Gb/s NRZ. The electro-optical bandwidth is 35 GHz, while the power consumption is 500mW, resulting in a power efficiency of 11.3 pJ/bit at 44 Gb/s. The reported transmitter results in a compact and power efficient solution compared to others in a silicon monolithic approach and comparable to hybrid solutions, within the higher 3 dB electro-optical bandwidth that can be found in the literature.
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基于分段Mach-Zehnder调制器的EPIC 250nm BiCMOS单片集成光电发射机
提出了一种基于分段马赫-曾德尔调制器的单片集成光电发射机。该芯片采用IHP开发的250nmSiGe BiCMOS SG25H5 EPIC技术制造,该技术是一种硅光子技术,结合了0.25 $\mu$m CMOS,高性能npn hts(具有$\ mathm {f}_{\ mathm {t}}$/fmax为210/290 GHz)和C/ o波段的全光子器件集。该芯片包括一个线性电驱动器,一个5段Mach-Zehnder调制器,总移相器长度为2mm。光电时域测量显示睁眼图高达44 Gb/s NRZ。电光带宽为35ghz,功耗为500mW,在44gb /s速率下的功率效率为11.3 pJ/bit。与硅单片方法中的其他方法相比,所报告的发射机具有紧凑且节能的解决方案,可与混合解决方案相媲美,并且可以在文献中找到更高的3db电光带宽。
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