Disorder of a GaAs-AlGaAs Quantum Well as a Technique For Fabricating Quantum Wires

H. Zarem, P. Sercel, M. Hoenk, A. Yariv, K. Vahala
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Abstract

Submicron bandgap tailoring of semiconductors has many exciting applications such as optical waveguiding and carrier confinement. When the carriers are confined to dimensions comparable to their deBroglie wavelength, they exhibit quantum size effects [1,2,3]. Techniques such as molecular beam epitaxy of GaAs-AlGaAs structures allow for such tailoring in one dimension, but control in the other two dimensions requires other techniques. Most of the work toward lateral confinement of carriers to these dimensions has focused on etching techniques [1,3] due to the lack of other methods for creating such small structures. For most device applications, however, a lateral confining structure which does not create an exposed surface is essential. One such technique is the use of ion implantation to selectively disorder a quantum well [2].
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GaAs-AlGaAs量子的无序性及量子线的制备技术
半导体的亚微米带隙裁剪有许多令人兴奋的应用,如光波导和载流子约束。当载流子被限制在与其德布罗意波长相当的尺寸时,它们表现出量子尺寸效应[1,2,3]。像GaAs-AlGaAs结构的分子束外延这样的技术允许在一个维度上进行这种剪裁,但在其他两个维度上的控制需要其他技术。由于缺乏创造这种小结构的其他方法,大多数关于载流子侧向限制到这些尺寸的工作都集中在蚀刻技术上[1,3]。然而,对于大多数设备应用来说,不产生暴露表面的横向限制结构是必不可少的。其中一种技术是使用离子注入来选择性地扰乱量子阱[2]。
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