{"title":"Library setup for epitaxial layer dopant profile using spreading resistance profiling analysis","authors":"Lim Saw Sing, L. Way","doi":"10.1109/IPFA.2014.6898167","DOIUrl":null,"url":null,"abstract":"The paper describes an approach to establish library for epitaxial layer monitoring using spreading resistance profiling (SRP) technique. This library can be used as complementary technique for conventional epitaxial monitoring such as inline four-point probe (FPP) or surface charge profiler (SCP).","PeriodicalId":409316,"journal":{"name":"Proceedings of the 21th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)","volume":"59 4 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-09-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 21th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IPFA.2014.6898167","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
The paper describes an approach to establish library for epitaxial layer monitoring using spreading resistance profiling (SRP) technique. This library can be used as complementary technique for conventional epitaxial monitoring such as inline four-point probe (FPP) or surface charge profiler (SCP).
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