Understanding of self-heating enhanced degradation in pLDMOSFETs by MR-DCIV method

Yandong He, Ganggang Zhang, Xing Zhang
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Abstract

Self-heating enhanced degradation in pLDMOSFETs was studied by non-destructive MR-DCIV method. Due to self-heating effect in pLDMOSFETs, several times larger MR-DCIV degradation per finger was observed for multi-finger devices with higher temperature rise and less channel edge heat dissipation. Our study has shown that self-heating induced degradation shared the similar trends and mechanism to NBTI.
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用MR-DCIV方法了解pldmosfet的自热增强降解
采用非破坏性MR-DCIV方法研究了pldmosfet的自热增强降解。由于pldmosfet中的自热效应,对于具有较高温升和较少通道边缘散热的多指器件,观察到每指MR-DCIV衰减数倍。我们的研究表明,自热诱导降解与NBTI具有相似的趋势和机制。
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