Demonstration of blue vertical-cavity surface-emitting laser diode

S. Yoshii, T. Yokogawa, A. Tsujimura, Y. Sasai, J. Merz
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Abstract

We report on the first demonstration of an electrically-pumped blue VCSEL. Laser action was achieved at a wavelength of 484 nm under pulsed current injection at 77 K. The VCSEL structure was composed of a CdZnSe/ZnSe multi-quantum-well active layer, ZnSe cladding layers, and SiO/sub 2//TiO/sub 2/ distributed Bragg reflectors (DBRs). The CdZnSe/ZnSe epitaxial layers were grown by molecular beam epitaxy (MBE) directly on a GaAs (100) substrate at a growth temperature of 270/spl deg/C. The MQW structure consisted of Cd/sub 0.2/Zn/sub 0.8/Se quantum wells and ZnSe barriers.
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蓝色垂直腔面发射激光二极管的演示
我们报告了电泵蓝色VCSEL的首次演示。在77 K的脉冲电流注入下,激光作用波长为484 nm。VCSEL结构由CdZnSe/ZnSe多量子阱有源层、ZnSe包层和SiO/sub 2//TiO/sub 2/分布式Bragg反射器(DBRs)组成。采用分子束外延法(MBE)在GaAs(100)衬底上生长CdZnSe/ZnSe外延层,生长温度为270℃。MQW结构由Cd/sub 0.2/Zn/sub 0.8/Se量子阱和ZnSe势垒组成。
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