On the nonlinear behaviour of MEMS resonators

Abstract

This work is focussed on the nonlinear dynamic response of electrostatically actuated micro-resonators. A single span beam axially constrained at both end, possibly with elastic constraints, is considered as representative of different common layout of micro-resonators. An analytical model, based on the Hamilton's principle, accounting for mechanical and electrical nonlinearities is derived. The analytical prediction is compared with experimental measurements obtained on a L-shaped micro-resonator.