Specialty Coatings to Reduce Corrosion in Scrubber Components : Advanced Equipment Process and Materials

Abstract

Scrubbers play an essential role in the safe manufacturing of semiconductor devices. However, metal parts degrade very quickly in the highly corrosive scrubber environment, and this poses an environmental and safety challenge. In this paper, we present data for specialty coatings that significantly reduce the corrosion rate of metal scrubber parts. The benefits are a reduction of heavy metals in the waste stream, a minimized exposure of employees to the corroded parts, a solid-waste reduction, and a lower cost in part replacements. In short, the quality of the semiconductor process is improved, and the cost reduced.