Influence of MOVPE growth conditions and substrate parameters on the structural quality of multi-period InGaAsP/InP MQW structures

F. Reier, C. Bornholdt, D. Hoffmann, F. Kappe, L. Morl
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Abstract

In this work we have investigated the MOVPE growth of multi-period InGaAsP/InP quantum confined Stark effect (QCSE) layer structures and provide evidence that the QCSE response can be influenced by optimizing the gas exchange procedure, mainly to minimize carry-over effects. Secondly, we present new results on the thermal stability behaviour of these MQW structures which appear to be strongly related with the underlying buffer layer and substrate material.
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MOVPE生长条件和衬底参数对多周期InGaAsP/InP MQW结构质量的影响
在这项工作中,我们研究了多周期InGaAsP/InP量子受限斯塔克效应(QCSE)层结构的MOVPE生长,并提供了证据,证明QCSE响应可以通过优化气体交换程序来影响,主要是为了最小化结转效应。其次,我们提出了这些MQW结构的热稳定性行为的新结果,这些结构似乎与底层缓冲层和衬底材料密切相关。
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